Feedback-controlled laser fabrication of micromirror substrates
نویسندگان
چکیده
منابع مشابه
Feedback-controlled laser fabrication of micromirror substrates.
Short (40-200 μs) single focused CO(2) laser pulses of energy ≳100 μJ were used to fabricate high quality concave micromirror templates on silica and fluoride glass. The ablated features have diameters of ≈20-100 μm and average root-mean-square (RMS) surface microroughness near their center of less than 0.2 nm. Temporally monitoring the fabrication process revealed that it proceeds on a time sc...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2011
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.3671291